JAYE HEATER designs and manufactures high-performance vacuum diffusion pump tubular heaters for semiconductor, thin film, and vacuum coating applications. Custom voltages, wattages, and sizes available.
Jaye Heater Technology Co., Ltd. is one of the most reliable manufacturers and suppliers of vacuum diffusion pump tublular heater in China, also supports custom service. Welcome to wholesale high quality vacuum diffusion pump tublular heater at competitive price from our factory.
A diffusion pump cannot function without controlled heat. The tubular heater is mounted at the base of the pump and heats the working fluid to its vaporization point. The vapor then travels through the pump's jet nozzles, capturing residual gas molecules and pushing them toward the exhaust, achieving pressures in the high-vacuum and ultra-high-vacuum range.
At JAYE HEATER, we manufacture tubular heaters specifically for diffusion pump applications. Our heaters are built with high-purity magnesium oxide insulation, durable metal sheaths, and precision-formed heating coils. We offer standard replacements as well as fully customized solutions to match your pump model, voltage, power, and mounting requirements.
Our vacuum diffusion pump tubular heaters are available in a wide range of electrical and physical configurations. Below are typical specifications we can manufacture:
| Parameter | Typical Range / Options |
|---|---|
| Sheath Material | Stainless Steel 304 / 316 / 321, Incoloy 800 / 840 |
| Insulation Material | High-purity MgO |
| Voltage | 208V, 240V, 380V, 480V, custom |
| Power | 500W – 10,000W |
| Phase | Single-phase / Three-phase |
| Maximum Sheath Temperature | Up to 750°C |
| Resistance Tolerance | ±5% or ±10% |
| Heater Diameter | Customized to pump platen |
| Mounting Type | Cast platen, clamp, swaged assembly |
| Lead Wire | Fiberglass, PTFE, ceramic fiber, silicone |
| Termination | Ceramic block, screw terminal, lead wire |
| Thermocouple | Type J / K optional |
| Customization | Voltage, wattage, dimensions, shape, fittings |
We can produce heaters for popular diffusion pump brands and models, including Agilent Varian, Edwards, Leybold, Pfeiffer, and other OEM equivalents. If you provide the pump model or original heater drawing, our engineering team will match or improve the design.
JAYE HEATER's vacuum diffusion pump tubular heaters are built for demanding industrial environments. Key features include:
High Thermal Efficiency – Dense MgO filling and precise coil winding ensure rapid heat transfer to the pump boiler.
Uniform Heat Distribution – Swaged or cast platen designs eliminate hot spots and promote stable vapor generation.
Long Service Life – Corrosion-resistant sheath materials and high dielectric strength reduce burnout risk.
Fast Warm-Up – Optimized power density shortens pumpdown time and improves system productivity.
Excellent Dielectric Strength – Suitable for high-voltage operation with reliable insulation performance.
Custom Fit – We manufacture to your exact dimensions, mounting pattern, and electrical rating.
Energy Efficient – Balanced resistance and thermal contact lower power consumption.
Easy Installation – One-piece or platen-mounted designs simplify replacement and alignment.
Stable Vacuum Performance – Consistent heating prevents pressure fluctuations and process drift.
JAYE HEATER tubular heaters are widely used in diffusion pump systems across many industries:
Semiconductor Manufacturing – Ion implantation, PVD, CVD, and epitaxial growth.
Thin Film Deposition – Sputtering, evaporation, and molecular beam epitaxy.
Optical Coating – Precision filters, mirrors, and anti-reflective coatings.
Vacuum Coating – Decorative, functional, and hard coatings.
Vacuum Distillation – High-purity chemical separation and processing.
Metallurgical Processing – Vacuum melting, sintering, and heat treatment.
Solar & Flat Panel Display – Thin-film solar cells and display panel production.
Research & Development – University, national laboratory, and aerospace vacuum systems.
Analytical Instruments – Mass spectrometry and surface analysis equipment.
As a dedicated heating element manufacturer, we control every stage of production-from resistance wire selection to final electrical testing. Our team offers:
Engineering support for custom voltage, wattage, and geometry
Strict quality control and performance testing
Fast sample turnaround and reliable mass production
Competitive factory-direct pricing
Export experience for global vacuum equipment suppliers
We help you reduce downtime, extend pump life, and maintain consistent vacuum quality.
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