How To Use Pump Flat Heater In Semiconductor Applications

Placement

Regardless of pump design, wrap or place the flat heater around the pump housing, oil chamber, or foreline trap area.

For proper and efficient heating, make sure you make flat contact with the surface where you're installing the heater.

Connection

Plug the heater into a power supply. Make sure you match the rated voltage.

If you are using an external controller, you will have to connect the temperature probe to your location of interest.

 

Temperature Control

Set the temperature you want (around 60-90 degrees C for semiconductor processes).

During the initial heating phase, monitoring will be required to calibrate the temperature.

Operation

For cleanroom or fab applications, leave the heater on continuously while the pump is operating to prevent vapor condensation and protect pump oil.

Maintenance

Inspect the heater regularly for wear or thermal degradation.

Clean the contact surface and reapply the heater using your clamps or fasteners if required.

 

 

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